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Gail:
Non-crystalline materials will etch more or less uniformly in all directions, so you will always get undercut. There are various techniques that will allow you to get a relatively straight sidewall, but you will always get undercut and the deeper you try to etch the more undercut you will get. Next time try allowing for the undercut when you make your etch mask. You should be able to find the etch rates on the good old Inter-web, you can find everything else there. Try searching for etching, or micromachining, or chemical milling as a start.
Crystalline materials behave differently, but I don't think many people here are going to be setting up a backyard integrated circuit/micro-electromechanical-machine fab shop. (I want to visit it if you do.)
Don
Non-crystalline materials will etch more or less uniformly in all directions, so you will always get undercut. There are various techniques that will allow you to get a relatively straight sidewall, but you will always get undercut and the deeper you try to etch the more undercut you will get. Next time try allowing for the undercut when you make your etch mask. You should be able to find the etch rates on the good old Inter-web, you can find everything else there. Try searching for etching, or micromachining, or chemical milling as a start.
Crystalline materials behave differently, but I don't think many people here are going to be setting up a backyard integrated circuit/micro-electromechanical-machine fab shop. (I want to visit it if you do.)
Don
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