Gordon,
You could consider the chemical etching technique that most knife makers use to etch their logos on to their knives (both hardened carbon and stainless steel). Just Google "photo resist etching"...
Here's an image of my knife-maker's logo:
View attachment 126360
And here's what it looks like on a knife:
View attachment 126361
and a wider view (on a different knife...)
View attachment 126362
This process involves the spraying on of a chemical "etch resist", the exposure of a "photo positive" (old film type positive made by either exposing an old-time film, or much easier just printing it on a transparent film using a photo copier), and then etching the metal with an acid or other etching chemical - I use ferric chloride. The very fine lines forming the fingers of this Bushman rock painting are perhaps 0.5mm thick (I suspect even thinner, but have never measured them), and as can be seen in the first photo they etch quite well, so making very fine markings will only be limited by the accuracy and clarity of the photo positive, with the photo-copying process giving not quite as good results. For less critical use (e.g. numbering of tools), one can eliminate the photo positive process, and just write on the clear film with a sharpie marker, or print a "negative" image on a laser printer with the number being left blank, and the surrounding area filled with black to create the number.
Hennie